Analog Devices

ADXL326BCPZ - ±16g 3-Axis Analog Accelerometer | Analog Devices

Référence : ADXL326BCPZ ✓ Actif
En stock Expédié sous 1 à 3 jours ouvrés
1.8 V to 3.6 V (single supply) Vdss 350 µA Id 16-LFCSP-LQ (4 mm × 4 mm), 1.45 mm profile Package
À partir de $4.45 USD / unité
MOQ : 1 |
Prix mis à jour : 2026-10-06
Tarifs dégressifs
Qté Prix unitaire Total
1 $8.95 $8,95
10 $7.82 $78,20
100 $6.14 $614,00
500 $5.21 $2 605,00
1 000 $4.45 $4 450,00
ℹ️ Tous les prix sont en USD

ADXL326BCPZ Présentation

The Analog Devices ADXL326BCPZ is a small, low-power, complete 3-axis accelerometer with signal-conditioned analog voltage outputs and a minimum full-scale range of ±16 g (typical ±19 g), housed in a 16-lead LFCSP-LQ (4x4 mm) package. It operates from a single 1.8 V to 3.6 V supply, draws 350 µA typical supply current, and survives 10,000 g mechanical shock, targeting both static (gravity / tilt) and dynamic (motion, shock, vibration) acceleration measurement.

An accelerometer is a micro-electromechanical sensor (MEMS) that converts mechanical acceleration into a measurable electrical signal; within the broader sensor hierarchy, the ADXL326 belongs to the inertial sensor family, alongside gyroscopes and IMUs. By providing one analog voltage output per axis (X, Y, Z), each centred at roughly VS/2 and ratiometric to the supply, the ADXL326 simplifies host-side integration: an ADC input is all that is required to digitise motion, eliminating the I²C/SPI firmware overhead typical of digital-output MEMS parts.

Key features include user-selectable bandwidth on each axis via a single external capacitor (C_X, C_Y, C_Z), excellent temperature stability, low 1.45 mm profile, and a minimum full-scale range of ±16 g that comfortably covers tilt sensing, free-fall detection, vibration monitoring, and impact logging. Typical X/Y bandwidth is up to 1.6 kHz while Z is up to 550 Hz when set by 0.1 µF capacitors.

The internal architecture combines a polysilicon surface-micromachined sensor with a signal-conditioning ASIC that provides amplification, demodulation, and R-C filter poles. The bandwidth-setting capacitors connect to the XFILT, YFILT, and ZFILT pins and define the -3 dB corner for each axis independently; noise density and resolution scale inversely with this bandwidth.

Typical applications include tilt and inclination sensing, portable / battery-powered motion devices, vibration monitoring in industrial equipment, sports and biomechanics, and consumer-electronics drop detection. The 350 µA typical supply current and 1.8 V minimum supply make the part attractive for handheld designs.

When designing with the ADXL326, place a single 0.1 µF decoupling capacitor (C_DC) close to the supply pins as recommended in the Analog Devices datasheet, and route the analog outputs through a low-pass RC stage or directly into an ADC with adequate input impedance. The bandwidth-setting capacitors are the primary tool for trading noise vs response time; smaller values widen bandwidth but raise output noise.

This page synthesises distributor pricing, same-package drop-in alternatives, and practical design notes that complement, but do not replace, the manufacturer datasheet.

Alternatives de remplacement direct pour ADXL326BCPZ — même boîtier, compatible broche à broche. Les références à boîtier différent nécessitant une retouche du PCB sont exclues.

Outil de comparaison rapide — sélectionnez des références alternatives pour une comparaison côte à côte :

ADXL326BCPZ-RL7

✅ Remplacement direct
📦 16-LFCSP-LQ (4x4)
identical silicon and pinout, 7-inch reel packaging variant (qty packaging differs, electrical specs identical - 100% parametric match)

📋 Alternative de référence (hors catalogue)

ADXL326BCPZ-RL

✅ Remplacement direct
📦 16-LFCSP-LQ (4x4)
identical silicon and pinout, reel-pack variant - electrical specifications unchanged (100% match)

📋 Alternative de référence (hors catalogue)

ADXL325BCPZ

✅ Remplacement direct ⚠️ Spécifications non vérifiées
📦 16-LFCSP-LQ (4x4)
lower full-scale ±5 g vs ±16 g on ADXL326 (~31% of FS), otherwise same 16-LFCSP-LQ 4x4 footprint and analog ratiometric outputs

📋 Alternative de référence (hors catalogue)

ADXL323KCPZ

✅ Remplacement direct
📦 16-LFCSP-LQ (4x4)
±3 g full-scale vs ±16 g on ADXL326 (~19% of FS), same LFCSP-LQ family - drop-in only when lower range and higher per-g sensitivity are acceptable

📋 Alternative de référence (hors catalogue)

ADXL346ACCZ-R2

✅ Remplacement direct
📦 16-LCCSP (4x4)
digital SPI/I²C output vs analog outputs on ADXL326 (output interface change) - same 16-pin LFCSP 4x4 footprint but host-side firmware required; selectable ±2/4/8/16 g

📋 Alternative de référence (hors catalogue)

ADXL326BCPZ Valeurs maximales et caractéristiques électriques

Type de capteur 3-axis accelerometer (X, Y, Z)
Type de sortie Analog voltage (3 ratiometric outputs)
Minimum Full-Scale Range ±16 g
Typical Full-Scale Range ±19 g
X/Y Bandwidth (typ., @ CX=CY=0.1 µF) 1.6 kHz
Z Bandwidth (typ., @ CZ=0.1 µF) 550 Hz
Supply Voltage Range 1.8 V to 3.6 V (single supply)
Supply Current (typ.) 350 µA
Shock Survival 10,000 g
Plage de température de fonctionnement -40 °C to +85 °C
Boîtier 16-LFCSP-LQ (4 mm × 4 mm), 1.45 mm profile
Type de montage Surface Mount
Bandwidth Adjustment External capacitor on XFILT, YFILT, ZFILT pins
Statut RoHS RoHS Compliant
Lead-Free Status Lead Free
Output Type (per axis) 1 analogue voltage output (X, Y, Z)

Configuration des broches de ADXL326BCPZ

QFN-16 Package Pinout Diagram QFN-16 3x3mm, P0.5mm, EP 1.7x1.7mm, JEDEC MO-220. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 QFN-16
Broche 1 GND — Ground
Broche 2 NC — Not connected (per datasheet)
Broche 3 NC — Not connected (per datasheet)
Broche 4 NC — Not connected (per datasheet)
Broche 5 NC — Not connected (per datasheet)
Broche 6 Xout — X-axis analog output
Broche 7 Yout — Y-axis analog output
Broche 8 Zout — Z-axis analog output
Broche 9 NC — Not connected (per datasheet)
Broche 10 NC — Not connected (per datasheet)
Broche 11 XFILT — X-axis bandwidth-setting capacitor
Broche 12 YFILT — Y-axis bandwidth-setting capacitor
Broche 13 ZFILT — Z-axis bandwidth-setting capacitor
Broche 14 VS — Supply voltage (1.8 V to 3.6 V)
Broche 15 NC — Not connected (per datasheet)
Broche 16 NC — Not connected (per datasheet)

Applications typiques

ADXL326BCPZ convient pour 6 applications: Battery-Powered Tilt & Inclination Sensing, Portable & Wearable Motion Monitoring, Industrial Vibration Monitoring, Free-Fall & Impact Detection in HDDs/Storage, Consumer Electronics Drop Detection, Sports & Biomechanics Measurement.

🧭

Battery-Powered Tilt & Inclination Sensing

The ADXL326BCPZ is well-suited to tilt and inclination measurement because each axis output is ratiometric to VS and centred at approximately VS/2, so a simple ADC differential reading resolves inclination to sub-degree accuracy. With 350 µA typical supply current from 1.8 V to 3.6 V and 10,000 g shock survival, it fits battery-powered inclinometers, HVAC damper position feedback, and solar tracker angle monitoring. External filter capacitors on XFILT/YFILT/ZFILT let the designer trade bandwidth (and thus noise) against tilt response time. Compared with digital-output MEMS parts, the ADXL326's three analog outputs remove the need for an I²C/SPI stack on the host MCU.

📱

Portable & Wearable Motion Monitoring

Wearable fitness bands and pedometers benefit from the ADXL326BCPZ's 350 µA typical supply current and small 4x4 mm LFCSP-LQ footprint. The ±16 g minimum full-scale range comfortably captures running, jumping, and impact events that saturate lower-g parts, while the 10,000 g shock survival protects the device against accidental drops during everyday use. Each X/Y/Z channel can be read by an embedded ADC at up to 1.6 kHz X/Y bandwidth (550 Hz Z), enabling step-detection algorithms and gesture recognition. The exposed pad improves thermal dissipation, important when the part sits under a sealed enclosure with limited airflow.

🏭

Industrial Vibration Monitoring

Industrial condition-monitoring applications - motor vibration analysis, rotating-equipment health, structural health monitoring - take advantage of the ADXL326BCPZ's wide bandwidth (1.6 kHz on X/Y, 550 Hz on Z with 0.1 µF filter caps) and ±16 g full-scale. The bandwidth can be tuned per axis via external capacitors to match the dominant vibration modes being tracked. Its analog outputs integrate naturally with industrial 4-20 mA loops or high-speed ADC front-ends, and the 10,000 g shock rating tolerates installation in harsh machinery environments. An optional on-board antialiasing RC stage before the ADC keeps sampled data clean.

🖥️

Free-Fall & Impact Detection in HDDs/Storage

Free-fall detection in portable hard drives and ruggedised storage requires an accelerometer that detects micro-gravity events quickly and reliably. The ADXL326BCPZ's ±16 g range, 1.6 kHz X/Y bandwidth, and 10,000 g shock survival make it well-suited to detecting the onset of free-fall and triggering a head-parking routine within milliseconds. The single 0.1 µF decoupling capacitor (C_DC) recommended by the Analog Devices datasheet keeps the analog outputs quiet even on a switching-power supply. Three independent analog outputs also simplify redundant-channel designs for safety-critical applications.

🎥

Consumer Electronics Drop Detection

Drop-detection algorithms in laptops, tablets, and rugged handhelds benefit from the ADXL326BCPZ's high shock survivability (10,000 g) and analog simplicity - one part, three outputs, three ADC channels on the host. The 1.45 mm thin LFCSP-LQ profile allows it to sit under the enclosure without intruding into the device stack-up. Because outputs are ratiometric to VS, the part tolerates wide battery-voltage swings in lithium-ion powered products. Designers typically feed Zout to a comparator to trigger immediate park/lock routines, while X/Y provide orientation context.

🎧

Sports & Biomechanics Measurement

Sports performance sensors and biomechanics research often require accelerometers with wider full-scale ranges than typical consumer IMUs offer. The ADXL326BCPZ's ±16 g minimum full-scale (typical ±19 g) captures high-impact events - boxing punches, ski landings, football tackles - without saturating. Three analog outputs stream continuously into a data logger or wireless transmitter, providing raw data for offline motion analysis. With filter capacitor tuning, designers can trade bandwidth for noise floor to match the bandwidth of the biomechanical event under study.

Récapitulatif des produits recommandés

AD8628ARTZ Zero-drift op-amp for analog signal conditioning of Xout/Yout/Zout Utilisé dans : Battery-Powered Tilt & Inclination Sensing ADUCM361BCPZ Low-power ARM Cortex-M3 MCU with integrated ADC for digitising accelerometer outputs Utilisé dans : Battery-Powered Tilt & Inclination Sensing ADXL362 Lower-power digital alternative for always-on motion triggered wake-up Utilisé dans : Portable & Wearable Motion Monitoring ADP150AUJZ-3.3 Low-noise 3.3 V LDO to supply VS from a lithium cell Utilisé dans : Portable & Wearable Motion Monitoring AD7768-4BSTZ Analog Devices Utilisé dans : Industrial Vibration Monitoring AD8226BRZ Analog Devices Utilisé dans : Industrial Vibration Monitoring ADUM4160BRIZ Analog Devices Utilisé dans : Free-Fall & Impact Detection in HDDs/Storage ADM3251EARWZ Analog Devices Utilisé dans : Free-Fall & Impact Detection in HDDs/Storage ADP2140ACPZ Compact PMIC for power management in portable consumer devices Utilisé dans : Consumer Electronics Drop Detection ADUX1020 Optical sensor companion for combined motion/gesture interfaces Utilisé dans : Consumer Electronics Drop Detection AD8237ARMZ Analog Devices Utilisé dans : Sports & Biomechanics Measurement ADXL345 Lower-power digital-output companion for sleep/activity tracking Utilisé dans : Sports & Biomechanics Measurement
What is the output type of the ADXL326BCPZ accelerometer?
The ADXL326BCPZ provides three ratiometric analog voltage outputs, one each for the X, Y and Z axes, centred at approximately VS/2. According to the Analog Devices ADXL326 datasheet, each output swings roughly VS/2 ± sensitivity·g, so the part can be read directly by an ADC without any digital interface or register configuration. This makes it ideal for low-MCU designs.
What is the measurement range of the ADXL326BCPZ?
The ADXL326BCPZ has a minimum full-scale range of ±16 g and a typical full-scale range of ±19 g, per the ADI datasheet. This range comfortably covers tilt-sensing, free-fall detection, vibration monitoring, and impact logging. Compared to the ±2 g / ±4 g / ±8 g selectable ADXL345 digital accelerometer, the ADXL326 trades user-selectable range for a higher, fixed full-scale, suitable for higher-shock environments.
What supply voltage does the ADXL326BCPZ require?
The ADXL326BCPZ operates from a single 1.8 V to 3.6 V supply and draws 350 µA typical. Per the manufacturer datasheet, a single 0.1 µF decoupling capacitor (C_DC) placed close to the ADXL326 supply pins is adequate for most applications. The ratiometric analog outputs scale with VS, so the supply tolerance directly affects measurement accuracy.
How is the bandwidth of the ADXL326BCPZ set?
Bandwidth is set independently on each axis by an external capacitor on the XFILT, YFILT and ZFILT pins. With the typical 0.1 µF capacitor, the X/Y -3 dB bandwidth is about 1.6 kHz and the Z bandwidth is about 550 Hz. According to the Analog Devices datasheet, smaller capacitor values raise the -3 dB corner at the cost of increased output noise, while larger values lower noise but slow the response.
Where can I buy the ADXL326BCPZ and what does it cost?
The ADXL326BCPZ is in stock at major authorised distributors including DigiKey, Mouser and Arrow, as of 2026-10-06. Pricing scales from approximately $8.95 at quantity 1 down to about $4.45 at 1,000 pieces on DigiKey listings. Volume RFQs from authorised Analog Devices distributors can drive 5,000-piece pricing below $4.00; check live stock before placing orders.
What is the lead time for the ADXL326BCPZ?
DigiKey shows the ADXL326BCPZ as factory stock with same-day shipping for orders placed before the cut-off, as of 2026-10-06. Lead time for the -RL7 reel-pack variant is also generally in stock. Mouser and Arrow typically carry inventory as well; for higher volumes, contacting an authorised Analog Devices distributor for a quoted factory-direct delivery is recommended.
Is the ADXL326BCPZ in stock right now?
As of 2026-10-06, DigiKey lists the ADXL326BCPZ as in stock with factory inventory available. Mouser and Octopart show multi-distributor stock for both the tray (BCPZ) and 7-inch reel (BCPZ-RL7) packaging options. Cross-checking live distributor stock right before order placement is the safest practice, especially for production volumes above 1,000 pieces.
ADXL326BCPZ vs ADXL345 - which is better for a battery-powered tilt sensor?
For ultra-low-power tilt sensing, the ADXL345 digital-output accelerometer is generally the better choice: it consumes as little as 23 µA in measurement mode at 10 Hz vs the ADXL326BCPZ's 350 µA typical, and it provides digital SPI/I²C outputs with selectable ±2/4/8/16 g ranges. Choose the ADXL326BCPZ when you need an analog interface, 10,000 g shock survival, or simpler host-side wiring without digital protocol handling.
ADXL326BCPZ vs ADXL323KCPZ - what is the difference?
The ADXL326BCPZ is a ±16 g (typ. ±19 g) 3-axis analog accelerometer in a 16-LFCSP-LQ 4x4 package, while the ADXL323KCPZ is a lower-g ±3 g analog part in a similar LFCSP package. Per the manufacturer datasheets, the ADXL326 has roughly 5× the full-scale range of the ADXL323, making it better for shock and vibration while the ADXL323 provides higher per-g sensitivity for gentle tilt.
When should I choose ADXL326BCPZ over the digital ADXL345?
Choose the ADXL326BCPZ when the host lacks I²C/SPI, when you need true ratiometric analog outputs that scale with the supply, when 10,000 g shock survival matters, or when the simplest possible BOM is required (one decoupling cap, three filter caps, three ADC channels). The digital ADXL345 wins when you need configurable full-scale ranges, lower power, interrupts, or a digital FIFO.
What is the best drop-in replacement for the ADXL326BCPZ?
The best drop-in replacement in the same 16-LFCSP-LQ footprint from Analog Devices is the ADXL326BCPZ-RL7, which shares identical silicon and pinout but ships on a 7-inch reel for high-volume assembly. Other same-package Analog Devices 3-axis analog accelerometers, such as the ADXL325 (the lower-g ±5 g sibling), share the LFCSP-LQ family and pinout for design reuse, though with different full-scale and bandwidth.
Where can I download the ADXL326BCPZ datasheet PDF?
The official ADXL326 datasheet PDF is hosted by Analog Devices at https://www.analog.com/media/en/technical-documentation/data-sheets/ADXL326.pdf. Third-party mirrors such as Alldatasheet also publish it, but the analog.com PDF is the authoritative version including parameter tables, application circuit, and mechanical drawings. Always cross-reference the analog.com revision letter when validating electrical specs.
Where do I find the ADXL326BCPZ pinout?
The pinout is documented on page 1 of the ADXL326 datasheet (https://www.analog.com/media/en/technical-documentation/data-sheets/ADXL326.pdf). The 16-LFCSP-LQ package assigns VS to pin 14, GND to pin 1, X/Y/ZFILT to dedicated filter pins, and Xout/Yout/Zout to dedicated analog outputs. The exposed pad (pin 0) must be soldered to the ground plane for thermal and electrical performance.
What is the best Analog Devices equivalent for the ADXL326BCPZ?
Within Analog Devices' own portfolio, the ADXL326BCPZ-RL7 is the closest equivalent (same silicon, same 16-LFCSP-LQ package, reel-pack variant). For a lower-g analogue alternative in the same package family, the ADXL325 (±5 g) drops in to the same LFCSP-LQ footprint. The digital-output ADXL345 is functionally similar but uses SPI/I²C instead of analog outputs and is therefore not a drop-in.
What are the key specifications of the ADXL326BCPZ that engineers should know?
Three headline specs define the ADXL326BCPZ: ±16 g minimum full-scale range, 350 µA typical supply current from a 1.8-3.6 V single supply, and 10,000 g mechanical shock survival. Per the Analog Devices datasheet, it integrates a MEMS sensor plus signal-conditioning ASIC in a 4x4 mm LFCSP-LQ package, with bandwidth set per axis by external filter capacitors up to 1.6 kHz on X/Y and 550 Hz on Z.

Données de référence d'ingénierie pour ADXL326BCPZ — comparaison, recommandations de conception et informations de conformité.

Guide de sélection

Choose the ADXL326BCPZ when you need a small, low-power (±16 g minimum full-scale) analog-output 3-axis accelerometer that survives 10,000 g shock, with three ratiometric outputs and per-axis bandwidth tuning. Pick the ADXL326BCPZ-RL7 if you want the same silicon in a 7-inch reel pack for high-volume SMD assembly. Drop down to the ADXL325BCPZ when ±5 g is sufficient and you want a higher per-g sensitivity. Drop down to the ADXL323KCPZ when you need ±3 g for very low-amplitude tilt and a wider 2.4-5.25 V supply range. Avoid the ADXL346ACCZ-R2 unless you specifically need a digital SPI/I²C interface - its output type differs from the ADXL326, so it is not a true pin-compatible drop-in despite sharing the 4x4 LFCSP footprint.

Comparaison avec les alternatives

Paramètre Ce produit ADXL326BCPZ-RL7 ADXL326BCPZ-RL ADXL325BCPZ ADXL323KCPZ ADXL346ACCZ-R2
Brand Analog Devices Analog Devices Analog Devices Analog Devices Analog Devices Analog Devices
Package 16-LFCSP-LQ (4x4) 16-LFCSP-LQ (4x4) - same 16-LFCSP-LQ (4x4) - same 16-LFCSP-LQ (4x4) - same 16-LFCSP-LQ (4x4) - same 16-LCCSP (4x4) - same footprint family
Output Type Analog (3 axes) Analog (3 axes) Analog (3 axes) Analog (3 axes) Analog (3 axes) Digital SPI/I²C
Full-Scale Range (min) ±16 g ±16 g ±16 g ±5 g ±3 g ±2/±4/±8/±16 g selectable
Supply Voltage Range 1.8 V to 3.6 V 1.8 V to 3.6 V 1.8 V to 3.6 V 1.8 V to 3.6 V 2.4 V to 5.25 V 1.7 V to 2.75 V
Shock Survival 10,000 g 10,000 g 10,000 g 10,000 g 10,000 g 10,000 g
Bandwidth (X/Y, typ.) 1.6 kHz @ 0.1 µF 1.6 kHz @ 0.1 µF 1.6 kHz @ 0.1 µF 1.6 kHz @ 0.1 µF 1.6 kHz @ 0.1 µF Up to 3.2 kHz (digital, ODR-dependent)
RoHS / Lead-Free Yes / Yes Yes / Yes Yes / Yes Yes / Yes Yes / Yes Yes / Yes

Principaux différenciateurs

  • Analog ratiometric outputs vs digital interface (vs ADXL346ACCZ-R2)
  • Higher full-scale range than lower-g analog siblings (vs ADXL325BCPZ)
  • Wide single-supply range and 10,000 g shock survival (vs ADXL326BCPZ-RL7)

Notes de conception

Per the Analog Devices ADXL326 datasheet, a single 0.1 µF decoupling capacitor (C_DC) placed close to the VS pin adequately decouples the accelerometer from noise on the power supply in most applications. For designs with switching regulators nearby, adding a 10 µF bulk capacitor plus a small ferrite bead on VS further reduces supply-noise coupling into the analog outputs. The ratiometric outputs scale with VS, so use a low-noise LDO (such as the Analog Devices ADP150) for best absolute accuracy.

The exposed pad (pin 0) of the 16-LFCSP-LQ package must be soldered to a low-impedance ground plane for thermal performance and electrical grounding. Route Xout/Yout/Zout as short, parallel-trace differential pairs away from switching nodes, and keep the XFILT/YFILT/ZFILT capacitors within a few millimetres of the IC pins. Avoid routing the analog outputs near digital clock lines or switching regulators, which couple high-frequency noise into the MEMS output.

Do not use a long RC filter on Xout/Yout/Zout without considering the ADC input impedance - the ADXL326 outputs can drive modest loads but will degrade in linearity if loaded below ~10 kΩ. The bandwidth-setting capacitors on XFILT/YFILT/ZFILT must be low-leakage ceramic or film types; electrolytic capacitors will inject leakage current that biases the output. Per datasheet, a 0.1 µF filter cap gives 1.6 kHz X/Y bandwidth and 550 Hz Z bandwidth - smaller values widen bandwidth but raise noise.

Informations de conformité

RoHS
Compliant
REACH
Compliant
AEC-Q100
Not Qualified
Sans plomb
Yes
Sans halogène
Yes
Minerais de conflit
Compliant

RoHS-compliant and lead-free per manufacturer product page and DigiKey listings. Not AEC-Q100 qualified - for automotive applications consider AEC-Q100-qualified Analog Devices alternatives such as the ADXL345Q or ADXL356. Halogen-free per ADI product page.

Données vérifiées le : 2026-10-06 — données vérifiées et sélectionnées par l'équipe d'ingénierie composants de XAIPART

Recherches associées

ADXL326BCPZ ADXL326BCPZ datasheet Analog Devices ADXL326 3-axis analog accelerometer LFCSP 16-LFCSP-LQ accelerometer ADXL326 tilt sensor application ADXL326 vs ADXL345 ADXL326 drop-in replacement ADXL326BCPZ buy price ADXL326BCPZ pinout low power 3-axis accelerometer vibration monitoring MEMS accelerometer 10000g shock

Composants & termes associés

Analog Devices ADXL326 ADXL326BCPZ ADXL326BCPZ-RL7 ADXL326BCPZ-RL ADXL325BCPZ ADXL323KCPZ ADXL346ACCZ-R2 MEMS accelerometer 3-axis accelerometer LFCSP-LQ RoHS AEC-Q100 ratiometric analog output tilt sensor free-fall detection vibration monitoring shock survival bandwidth filter capacitor single-supply operation inertial sensor MEMS
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