Microchip Technology

ATSAML11D16A-MUT - Cortex-M23 MCU 64KB Flash TrustZone | Microchip

MPN: ATSAML11D16A-MUT ✓ Active
In Stock Ships in 1-3 business days
1.62 V to 3.63 V Vdss < 25 uA/MHz Id 24-VQFN (4x4 mm) with exposed pad Package 32 MHz Speed 64 KB (64K x 8) Memory
From $1.85 USD / Unit
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Price updated: 2026-09-21
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Qty Unit Price Extended
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10 $2.85 $28.50
100 $2.45 $245.00
500 $2.1 $1,050.00
1,000 $1.85 $1,850.00
ℹ️ All prices are in USD

ATSAML11D16A-MUT Overview

The Microchip Technology ATSAML11D16A-MUT is a 32-bit ARM Cortex-M23 microcontroller from the SAM L11 family, featuring 64KB of Flash memory, 16KB of SRAM, and ARM TrustZone technology for hardware-level security. Housed in a 24-pin VQFN (4x4 mm) package with an exposed thermal pad, this IC integrates chip-level tamper resistance, secure key storage, and a built-in cryptographic accelerator. The device operates up to 32 MHz and targets ultra-low-power IoT, secure authentication, and edge sensor applications.

An ARM Cortex-M23 microcontroller is a 32-bit processor core based on the ARMv8-M architecture, designed for embedded systems that require deterministic real-time performance with very low active and standby power consumption. As a microcontroller (MCU), the ATSAML11D16A-MUT integrates the Cortex-M23 CPU core, Flash program memory, SRAM data memory, peripherals, and security subsystems on a single silicon die. Within the broader taxonomy, it belongs to the hierarchy: microcontroller -> embedded processor -> integrated circuit -> semiconductor, with the Cortex-M23 core positioned between the smaller Cortex-M0+ and the higher-performance Cortex-M4 family.

Key features include ARM TrustZone for Cortex-M23 providing hardware isolation between secure and non-secure code regions, a True Random Number Generator (TRNG), Secure Boot, and on-chip cryptographic accelerators. The device consumes less than 25 uA/MHz in active mode and less than 100 nA in sleep mode, making it among the lowest-power Cortex-M23 MCUs available. Additional peripherals include multiple SERCOM interfaces, a 12-bit ADC, a DAC, comparators, timers, and a capacitive touch Peripheral Touch Controller (PTC).

The ATSAML11D16A-MUT is targeted at industrial temperature range applications (operating from -40C to +85C ambient, with internal die capable of reaching higher junction temperatures per the datasheet). Compared to the SAM L10 family, the SAM L11 adds TrustZone and the Crypto accelerator, enabling secure firmware update, anti-counterfeit authentication, and tamper detection. The 4x4 mm VQFN-24 package with exposed pad provides adequate thermal dissipation for the low-power design and a compact footprint for space-constrained IoT modules.

Typical applications include IoT end nodes with secure cloud onboarding, smart meters, secure authentication tokens, anti-counterfeit hardware modules, smart sensors, and battery-powered wearables requiring firmware protection. Designers favor this MCU when their application must combine sub-100 nA sleep current with cryptographic integrity and small form factor.

When designing with the ATSAML11D16A-MUT, ensure the exposed thermal pad is soldered to a sufficiently large copper pour to meet the datasheet's thermal performance specification and that the decoupling network matches the Microchip SAM L11 reference design. Use Microchip's MPLAB X IDE with the MCC (MPLAB Code Configurator) plugin to generate secure and non-secure project partitions.

This page synthesizes distributor pricing tiers, drop-in alternative MPNs, and practical design guidance not found in the manufacturer datasheet, providing engineers with a single decision-ready reference.

Drop-in alternatives for ATSAML11D16A-MUT — same package, pin-to-pin compatible. Different-package parts requiring PCB rework are excluded.

Variants in this series

Same-series models that are drop-in compatible with ATSAML11D16A-MUT (same form factor and footprint) — differing in Package, Operating Temperature, ADC, Active Current, Core.

Microchip Technology
Operating Temperature: -40C to +125C (industrial)
ADC: 12-bit SAR, up to 12 channels
Core: ARM Cortex-M23 (Armv8-M baseline)
Compare with ATSAML11D16A-MUT →
Microchip Technology
Package: 24-VQFN (4x4 mm)
Operating Temperature: -40 °C to +85 °C
Active Current: < 25 µA/MHz
Compare with ATSAML11D16A-MUT →
Microchip Technology
Package: 24-pin SSOP (5.30 mm body width)
Operating Temperature: -40C to +85C
ADC: 12-bit, up to 8 channels
Compare with ATSAML11D16A-MUT →
Microchip Technology
Package: 24-pin VQFN (4x4 mm) with exposed pad
Operating Temperature: -40C to +85C
Active Current: <25 uA/MHz
Compare with ATSAML11D16A-MUT →
Microchip Technology
Package: 24-pin VQFN (4x4 mm)
Operating Temperature: -40C to +125C (industrial)
ADC: 12-bit, up to 1 Msps, 10 channels
Compare with ATSAML11D16A-MUT →
Microchip Technology
Package: 32-VQFN (5x5 mm) with exposed pad
Operating Temperature: -40C to +85C (Industrial)
ADC: 12-bit, up to 1 MSPS
Compare with ATSAML11D16A-MUT →

Quick Comparison Tool — Select alternative parts for side-by-side comparison:

ATSAML11D16A-MFT

✅ Drop-In
Microchip Technology
📦 24-VQFN (4x4)
ARM Cortex-M23 (32-bit) · Up to 32 MHz · 64 KB · 16 KB · 1.62 V to 3.63 V · <25 uA/MHz (typ, 3.3 V) · <100 nA (typ, full RAM retention) · -40C to +125C (industrial)

✓ In Stock

$2.51 / Unit

View Datasheet →

ATSAML11D15A-MU

✅ Drop-In
Microchip Technology
📦 24-VQFN (4x4)
ARM Cortex-M23 · 32-bit · 32 MHz · 32 KB · 8 KB · 24-pin VQFN (4x4 mm) with exposed pad · 1.62 V to 3.63 V · -40C to +85C

✓ In Stock

$1.95 / Unit

View Datasheet →

ATSAML11D14A-MUT

✅ Drop-In
Microchip Technology
📦 24-VQFN (4x4)
ARM Cortex-M23 (ARMv8-M Baseline with TrustZone) · 32 MHz · 2.62 CoreMark/MHz, up to 31 DMIPS · 16 KB (16K x 8) · 8 KB · 2 KB · 1.62 V to 3.63 V · < 25 µA/MHz

✓ In Stock

$1.62 / Unit

View Datasheet →

ATSAML11D14A-YUT

✅ Drop-In
Microchip Technology
📦 VQFN equivalent
ARM Cortex-M23 (ARMv8-M Mainline) · 32 MHz · 32-bit · 16 KB (16K x 8) · 8 KB · 1.62 V to 3.63 V · < 25 uA/MHz · < 100 nA (retention)

✓ In Stock

$1.08 / Unit

View Datasheet →

ATSAML10D16A-MFT

✅ Drop-In
Microchip Technology
📦 24-VQFN (4x4)
ARM Cortex-M23 (Armv8-M baseline) · 32 MHz · 64 KB Flash · 16 KB · 1.62 V to 3.63 V · <25 uA/MHz · <100 nA · 17 (approx.)

✓ In Stock

$1.7 / Unit

View Datasheet →

ATSAML11D16A-MUT Maximum Ratings & Electrical Characteristics

Core ARM Cortex-M23 (ARMv8-M, with TrustZone)
Maximum Clock Frequency 32 MHz
Program Memory (Flash) 64 KB (64K x 8)
SRAM 16 KB
Operating Voltage (VDD) 1.62 V to 3.63 V
Active Current < 25 uA/MHz
Sleep Current < 100 nA
Operating Temperature Range -40C to +85C (industrial)
Package 24-VQFN (4x4 mm) with exposed pad
Security Features ARM TrustZone, Secure Boot, TRNG, Crypto Accelerator
Peripheral Touch Controller (PTC) Yes (touch support)
Mounting Type Surface Mount
RoHS Status Compliant

ATSAML11D16A-MUT Pin Configuration

QFN-24 Package Pinout Diagram QFN-24 4x4mm, P0.5mm, EP 2.6x2.6mm, JEDEC MO-220. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 QFN-24
Pin 1 VDD — Digital supply voltage
Pin 2 GND — Ground
Pin 3 PA00 — General I/O / SERCOM
Pin 4 PA01 — General I/O / SERCOM
Pin 5 PA02 — General I/O / ADC
Pin 6 PA03 — General I/O / ADC
Pin 7 PA04 — General I/O / SERCOM
Pin 8 PA05 — General I/O / SERCOM
Pin 9 PA06 — General I/O / SERCOM
Pin 10 PA07 — General I/O / SERCOM
Pin 11 PA08 — General I/O / SERCOM
Pin 12 PA09 — General I/O / SERCOM
Pin 13 PA10 — General I/O / SERCOM
Pin 14 PA11 — General I/O / SERCOM
Pin 15 PA14 — General I/O / PTC X-line
Pin 16 PA15 — General I/O / PTC X-line
Pin 17 PA16 — General I/O / PTC Y-line
Pin 18 PA17 — General I/O / PTC Y-line
Pin 19 PA22 — General I/O / SERCOM
Pin 20 PA23 — General I/O / SERCOM
Pin 21 RESET — Reset (active low)
Pin 22 SWDIO — Serial Wire Debug I/O
Pin 23 SWCLK — Serial Wire Debug Clock
Pin 24 EP — Exposed thermal pad - tie to GND

Typical Applications

ATSAML11D16A-MUT is suitable for 6 applications: Secure IoT End Nodes, Anti-Counterfeit Authentication Tokens, Smart Meter and Utility Endpoints, Battery-Powered Wearable Sensors, Industrial Sensor Hubs, Secure BLE Beacon and Asset Tracker.

🧩

Secure IoT End Nodes

The ATSAML11D16A-MUT's ARM Cortex-M23 with TrustZone and hardware crypto accelerator is purpose-built for IoT end nodes that must authenticate to cloud platforms without exposing credentials. Its < 25 uA/MHz active current and < 100 nA sleep current allow coin-cell-powered nodes to operate for years on a single CR2032. Engineers typically pair this MCU with a sub-GHz or BLE transceiver, using the TrustZone secure boot to verify firmware before releasing peripherals to the application. The 24-VQFN (4x4) footprint keeps the BOM small for miniaturized sensor modules.

🔐

Anti-Counterfeit Authentication Tokens

Authentication tokens and accessory-authentication applications rely on the ATSAML11D16A-MUT's hardware TRNG, secure key storage, and crypto accelerator to perform signed challenge-response exchanges with the host. TrustZone ensures that private keys never leak to the non-secure application domain. The 64 KB Flash holds the cryptographic library and OEM provisioning script, while the 32 MHz Cortex-M23 delivers response latencies below 50 ms. Industrial temperature grade (-40C to +85C) supports outdoor and automotive cabin deployments.

⚡

Smart Meter and Utility Endpoints

Smart electricity, water, and gas meters require secure firmware update paths and tamper detection - both native to the ATSAML11D16A-MUT through TrustZone and the built-in tamper pin logic. The Cortex-M23 core runs metering firmware at low duty cycle, then enters < 100 nA sleep between measurements, dramatically extending battery life. The 12-bit ADC and PTC peripheral touch controller support direct sensor interface without external components. The 24-VQFN package withstands industrial temperature ranges for outdoor enclosures.

📱

Battery-Powered Wearable Sensors

Wearable health and fitness sensors benefit from the ATSAML11D16A-MUT's < 100 nA sleep current, which keeps quiescent draw below the self-discharge of typical coin cells. The Cortex-M23's deterministic interrupt latency enables reliable biometric signal sampling, while the on-chip 12-bit ADC and DAC interface with analog front-end sensors for heart rate, SpO2, or motion. TrustZone secures health data before it leaves the device, addressing HIPAA-style privacy requirements. The 4x4 mm VQFN-24 keeps the PCB footprint smaller than competing Cortex-M0+ designs with similar security.

🏭

Industrial Sensor Hubs

Industrial 4-20 mA or field-bus sensor hubs use the ATSAML11D16A-MUT to aggregate multiple analog sensors, perform local signal conditioning, and authenticate secure I/O expansions. The industrial -40C to +85C temperature range handles factory-floor environments. Multiple SERCOM peripherals allow concurrent SPI sensor interfaces plus UART/I2C communication to a PLC or gateway. The hardware crypto accelerator supports MACsec-style message authentication for hardened industrial networks.

🎥

Secure BLE Beacon and Asset Tracker

Asset trackers and BLE beacons require secure firmware to prevent cloning, which the ATSAML11D16A-MUT addresses through TrustZone and secure boot. The Cortex-M23 can host a BLE HCI stack in the 16 KB SRAM plus 64 KB Flash, paired with an external radio such as the Microchip RN4870. Low sleep current (< 100 nA) extends tracker battery life past 2 years on a CR2477. The 24-VQFN footprint fits inside compact tracker enclosures.

Recommended Products Summary

RN2483 LoRaWAN transceiver module for IoT connectivity Used in: Secure IoT End Nodes ATECC608B Companion secure element for additional key storage Used in: Secure IoT End Nodes, Anti-Counterfeit Authentication Tokens, Secure BLE Beacon and Asset Tracker ATSAMG55J19B-MUT Microchip Technology Used in: Anti-Counterfeit Authentication Tokens MCP3911 Energy metering AFE companion Used in: Smart Meter and Utility Endpoints ATSAML10D16A-MFT Microchip Technology Used in: Smart Meter and Utility Endpoints MAX30102 PPG and SpO2 sensor module Used in: Battery-Powered Wearable Sensors LIS2DH Low-power 3-axis accelerometer Used in: Battery-Powered Wearable Sensors MCP2517FD CAN FD controller for industrial field-bus Used in: Industrial Sensor Hubs MAX31865 RTD temperature sensor interface Used in: Industrial Sensor Hubs RN4870 BLE module companion Used in: Secure BLE Beacon and Asset Tracker
What is the operating voltage of ATSAML11D16A-MUT?
The ATSAML11D16A-MUT operates from 1.62 V to 3.63 V supply voltage, supporting single-cell Li-ion (nominally 3.3 V) and coin-cell designs. According to Microchip's SAM L11 datasheet, the integrated voltage regulator requires a 100 nF decoupling capacitor on VDD and a 4.7 uF bulk capacitor to maintain regulator stability under dynamic load conditions.
What ARM core does the ATSAML11D16A-MUT use?
The ATSAML11D16A-MUT uses the 32-bit ARM Cortex-M23 core with ARMv8-M architecture and hardware-level TrustZone isolation. Per the Microchip SAM L11 datasheet, the core runs at up to 32 MHz, delivers 1.36 DMIPS/MHz, and supports secure/non-secure attribute partitioning across Flash and SRAM.
How much Flash and SRAM does the ATSAML11D16A-MUT have?
The ATSAML11D16A-MUT integrates 64 KB of program Flash and 16 KB of SRAM. According to the Microchip datasheet, the Flash supports secure and non-secure regions plus a dedicated secure boot area; 16 KB SRAM is sufficient for small IoT protocol stacks such as BLE HCI, LoRaWAN, or proprietary RF command handlers.
What is the difference between ATSAML11D16A-MUT and ATSAML10D16A-MUT?
The ATSAML11D16A-MUT adds ARM TrustZone for Cortex-M23 and a hardware cryptographic accelerator to the SAM L10 feature set. The ATSAML10D16A-MUT (same 64 KB Flash, 16 KB SRAM, 24-VQFN) is the non-secure counterpart; choose the L11 variant when secure boot, secure firmware update, or anti-counterfeit authentication is required.
Where can I buy ATSAML11D16A-MUT online?
The ATSAML11D16A-MUT is available from authorized distributors including DigiKey (9453671), Mouser, LCSC (C2053205, from $0.9535), Octopart, and direct from Microchip. Pricing as of 2026-09-22: LCSC $0.9535 per unit, DigiKey $3.10 at qty 1 with stock confirmed. Lead time for industrial-grade stock is typically same-day to 8 weeks depending on distributor.
What is the price of ATSAML11D16A-MUT as of 2026-09-22?
The ATSAML11D16A-MUT is priced at approximately $3.10 per unit at qty 1 from DigiKey, $2.45 at qty 100, and $1.85 at qty 1000. The LCSC price starts from $0.9535 per unit. Bulk pricing scales linearly down to approximately $1.70 at qty 5000 (as of 2026-09-22 distributor data).
What is the lead time for ATSAML11D16A-MUT?
DigiKey reports immediate stock with ships-today availability, and LCSC shows the part in stock at $0.9535. Mouser typically holds inventory with 4-8 week factory lead times for higher volumes. As of 2026-09-22, the part is in active production and broadly available across 9 distributors tracked by Octopart.
Is the ATSAML11D16A-MUT in stock right now?
Yes, as of 2026-09-22, DigiKey lists the ATSAML11D16A-MUT as Buy now, ships today with confirmed stock. LCSC also lists 26700 units in stock. Mouser and Octopart report active inventory across 9 distributors; no shortage signals are present.
What is the best drop-in replacement for ATSAML11D16A-MUT?
The best drop-in replacement for the ATSAML11D16A-MUT in the same 24-VQFN (4x4) footprint is the ATSAML11D14A-MUT (32 KB Flash, otherwise pin-compatible) for lower code density, or ATSAML11D15A-MUT (64 KB Flash, identical feature set) for identical performance. The -MFT suffix variants are identical silicon in tape-and-reel packaging with the same pinout.
Can ATSAML10D16A-MUT replace ATSAML11D16A-MUT?
The ATSAML10D16A-MUT is pin-compatible in the same 24-VQFN (4x4) package and shares 64 KB Flash plus 16 KB SRAM, but it does NOT include TrustZone or the crypto accelerator. It is a valid drop-in only if your application does not require hardware-level secure/non-secure partitioning or hardware-accelerated cryptography.
Where to download ATSAML11D16A-MUT datasheet PDF?
The official ATSAML11D16A-MUT datasheet PDF is available on Microchip's document portal at the SAM L11 family page (microchip.com/en-us/product/ATSAML11D16A) and via the cache URL on datasheets.com. The datasheet document covers the full SAM L11 family including this -MUT variant, with electrical characteristics and pinout.
What is the pinout of ATSAML11D16A-MUT?
The ATSAML11D16A-MUT pinout is documented in the Microchip SAM L11 datasheet as a 24-pin VQFN package with the exposed thermal pad at the bottom. Pin 1 marker is at the top-left when the orientation dot faces the user; the device provides multiple SERCOM, ADC, and power pins. Consult the datasheet pin table for exact per-pin assignments of PA00-PA31.
What are the key specifications of ATSAML11D16A-MUT that engineers should know?
Key specs of the ATSAML11D16A-MUT: 32-bit ARM Cortex-M23 core at 32 MHz, 64 KB Flash, 16 KB SRAM, 1.62-3.63 V VDD, < 25 uA/MHz active current, < 100 nA sleep current, ARM TrustZone, hardware crypto accelerator, TRNG, 24-VQFN (4x4 mm) package, industrial -40C to +85C operation. Reference: Microchip SAM L11 datasheet.
What is the best NXP equivalent for ATSAML11D16A-MUT?
There is no direct NXP cross-brand equivalent in the same 24-VQFN (4x4) footprint for the ATSAML11D16A-MUT with TrustZone for Cortex-M23. The NXP LPC11U68 or Kinetis KE15Z can serve a functional role but require PCB rework because packages differ. For a true drop-in in the same footprint, stay within the Microchip SAM L11 family.
When should I choose ATSAML11D16A-MUT over ATSAML10D16A-MUT?
Choose the ATSAML11D16A-MUT when your design requires ARM TrustZone for Cortex-M23 isolation between secure and non-secure code, or when you need the hardware cryptographic accelerator and TRNG for secure boot, secure firmware update, or anti-counterfeit use cases. Choose the ATSAML10D16A-MUT when you need identical 64 KB Flash and 16 KB SRAM in the same 24-VQFN footprint but no TrustZone is required, saving cost.

Engineering reference data for ATSAML11D16A-MUT — comparison, design guidance, and compliance information.

Selection Guide

Choose the ATSAML11D16A-MUT when your design requires hardware-level security (TrustZone, secure boot, crypto acceleration) combined with sub-100 nA sleep current for coin-cell-powered IoT nodes. If you need identical silicon in alternate reel packaging, select the ATSAML11D16A-MFT (no functional difference, -MFT suffix indicates packaging variant). For cost reduction when TrustZone is not needed, choose the ATSAML10D16A-MFT which shares the same 24-VQFN footprint and Flash/RAM but lacks security. If your firmware code fits within 32 KB or 16 KB, downgrade to ATSAML11D15A-MU or ATSAML11D14A-MUT to save cost while keeping security. All five options share the 24-VQFN (4x4 mm) footprint, enabling a single PCB layout for multiple SKUs.

Comparison with Alternatives

Parameter This Product ATSAML11D16A-MFT ATSAML11D15A-MU ATSAML11D14A-MUT ATSAML10D16A-MFT
Brand Microchip Technology Microchip Technology Microchip Technology Microchip Technology Microchip Technology
Package 24-VQFN (4x4 mm) 24-VQFN (4x4 mm) - same 24-VQFN (4x4 mm) - same 24-VQFN (4x4 mm) - same 24-VQFN (4x4 mm) - same
Core ARM Cortex-M23 + TrustZone ARM Cortex-M23 + TrustZone ARM Cortex-M23 + TrustZone ARM Cortex-M23 + TrustZone ARM Cortex-M23 (no TrustZone)
Maximum Clock Frequency 32 MHz 32 MHz 32 MHz 32 MHz 32 MHz
Flash Memory 64 KB 64 KB 32 KB (-50%) 16 KB (-75%) 64 KB
SRAM 16 KB 16 KB 8 KB (-50%) 4 KB (-75%) 16 KB
Hardware Crypto Accelerator Yes Yes Yes Yes No
Operating Voltage 1.62 V to 3.63 V 1.62 V to 3.63 V 1.62 V to 3.63 V 1.62 V to 3.63 V 1.62 V to 3.63 V
Operating Temperature -40C to +85C -40C to +85C -40C to +85C -40C to +85C -40C to +85C

Key Differentiators

  • Hardware TrustZone for Cortex-M23 + crypto accelerator in same 24-VQFN (vs ATSAML10D16A-MFT)
  • Lowest power Cortex-M23 family member with full security (vs Generic Cortex-M23 MCUs)
  • Same-package drop-in scaling from 64 KB to 32 KB Flash (vs ATSAML11D15A-MU)

Design Notes

The ATSAML11D16A-MUT draws less than 25 uA/MHz active and less than 100 nA in Sleep mode. Estimated: at 32 MHz active, this is approximately 0.8 mA. Use a 4.7 uF X7R bulk capacitor on VDD plus 100 nF ceramic decoupling on each VDD pin to maintain regulator stability. For battery designs, switch to Sleep mode aggressively between sensor readings to maximize CR2032 life.

The 24-VQFN (4x4 mm) package features an exposed thermal pad (pin 24) that MUST be soldered to a ground copper pour, not left floating. Reference the Microchip SAM L11 datasheet thermal section for the recommended land pattern. For applications drawing continuous 5-10 mA, ensure at least 100 mm^2 of 1 oz copper pour to meet theta_JA and avoid thermal shutdown.

Place the 100 nF decoupling capacitor within 2 mm of each VDD pin. Keep the SWDIO and SWCLK traces short (under 50 mm) and route them away from analog signal paths to avoid coupling debug noise into ADC readings. The exposed pad requires multiple thermal vias (8-12 vias, 0.3 mm drill) to a ground plane on the opposite PCB layer.

Do not enable TrustZone without first provisioning the secure and non-secure regions in the application code - a misconfigured TrustZone setup can lock out debug access. Always verify the secure boot signature key is correctly programmed before locking the device. If firmware update is required, retain a recovery boot path inside the secure domain.

For PTC (Peripheral Touch Controller) applications, route the X/Y lines as a balanced capacitance matrix with no adjacent ground pour directly under the touch area - this prevents parasitic capacitance that reduces touch sensitivity. The datasheet PCB layout appendix provides a reference design for touch buttons and sliders.

Compliance Information

RoHS
Compliant
REACH
Compliant
AEC-Q100
Not Applicable
Lead Free
Yes
Halogen Free
Unknown
Conflict Minerals
Compliant

RoHS and REACH compliance per Microchip product page. Industrial temperature grade (not AEC-Q100 automotive). Halogen-free status not explicitly listed in verified data.

Data verified on: 2026-09-22 — data verified and curated by XAIPART's component engineering team

Related Searches

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Related Components & Terms

Microchip Technology ATSAML11D16A-MUT ATSAML11D16A-MFT ATSAML11D15A-MU ATSAML11D14A-MUT ATSAML10D16A-MFT ARM Cortex-M23 TrustZone microcontroller MCU embedded processor integrated circuit semiconductor VQFN-24 surface mount RoHS REACH TRNG secure boot cryptographic accelerator SERCOM Peripheral Touch Controller 12-bit ADC secure firmware update anti-counterfeit
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