NXP Semiconductors

MPVZ4006G6U - 0-6kPa Vented Gauge Pressure Sensor, 8-SMD | NXP

Teilenummer: MPVZ4006G6U ✓ Aktiv
Auf Lager Versand in 1–3 Werktagen
4.75 V to 5.25 V (5 V typical) Vdss 8-SMD Module (SOP-8 with port) Package
Ab $7.18 USD / Stück
MOQ: 1 |
Preis aktualisiert: 2026-10-15
Mengenpreise
Menge Stückpreis Gesamt
1 $10.72 $10,72
10 $9.65 $96,50
100 $8.58 $858,00
500 $7.51 $3.755,00
1.000 $7.18 $7.180,00
ℹ️ Alle Preise sind in USD

MPVZ4006G6U Übersicht

The NXP (formerly Freescale) MPVZ4006G6U is a monolithic piezoresistive pressure sensor with on-chip signal conditioning, temperature compensation, and calibration, housed in an 8-pin SMD module (SOP-8 with port). It measures vented gauge pressure from 0 kPa to 6 kPa (0 to 0.87 PSI) and provides a ratiometric analog output from approximately 0.3 V to 4.6 V at 5 V supply.

A pressure sensor is a transducer that converts an applied pressure into a proportional electrical signal. Piezoresistive sensors use strain gauges diffused into a silicon diaphragm; when pressure deflects the diaphragm, the embedded resistors change value, producing a differential output. On-chip signal conditioning, temperature compensation, and calibration eliminate the need for external compensation networks, allowing the analog output to be read directly into an ADC input of a microcontroller. Within the broader sensor hierarchy, the MPVZ4006G6U belongs to the piezoresistive silicon pressure sensor family, which sits inside MEMS sensors, which sit inside sensors and transducers.

Key features include a pressure range of 0 kPa to 6 kPa (vented gauge), a ratiometric analog output (0.3 V to 4.6 V at 5 V supply), 5 V supply operation (4.75 V to 5.25 V), and high accuracy with on-chip calibration. The 8-SMD module package with a single horizontal port simplifies pneumatic interface via a small tube or sealed gasket. The vented gauge reference uses a rear-side vent path to atmospheric pressure, eliminating the need for external gauge reference plumbing.

Technically, the device uses advanced micromachining plus thin-film metallization plus bipolar semiconductor processing. The piezoresistive bridge is laser-trimmed during calibration to null offset and span errors at room temperature, with residual errors characterized over the -10 °C to +85 °C operating range. The ratiometric output scales with supply voltage, which means ADC readings performed with the same rail as VDD remain accurate across supply variation.

Typical applications include medical respiratory monitoring (CPAP, spirometry), HVAC variable-air-volume controls, appliance pressure sensing (water level, vacuum cleaner suction), industrial process monitoring, weather stations, and consumer fitness equipment. Its low pressure range and vented gauge reference make it well suited to differential pressure measurement across flow restrictors.

When designing with this part, place the sensor port in a stable mechanical environment to avoid pressure transients from tubing resonance. Use the same 5 V rail for the sensor and the ADC reference to take advantage of ratiometric cancellation of supply noise, and decouple VDD with a 100 nF ceramic capacitor placed within 5 mm of the supply pin.

This page synthesizes distributor pricing, drop-in alternatives, and practical design notes not found in the manufacturer datasheet alone.

Drop-in-Alternativen für MPVZ4006G6U – gleiches Gehäuse, Pin-kompatibel. Bauteile mit anderem Gehäuse, die eine PCB-Überarbeitung erfordern, sind ausgeschlossen.

Varianten dieser Serie

Modelle derselben Serie, die drop-in-kompatibel sind mit MPVZ4006G6U (gleiche Bauform und Footprint) – abweichend in Output Type, Accuracy, Operating Temperature, Package, Signal Conditioning.

NXP Semiconductors
Output Type: Analog Voltage
Operating Temperature: 0 °C to +85 °C
Package: 8-SMD Module (SOP-8 equivalent)
Vergleichen mit MPVZ4006G6U →
NXP Semiconductors
Accuracy: ±1.5% (0°C to 85°C)
Package: 8-DIP Module (through-hole, port style)
Signal Conditioning: On-chip (amplified, temperature compensated, calibrated)
Vergleichen mit MPVZ4006G6U →
NXP Semiconductors
Output Type: Analog, Ratiometric
Accuracy: ±1.5% (typical, 0°C to 85°C)
Operating Temperature: 0°C to +85°C
Vergleichen mit MPVZ4006G6U →
NXP Semiconductors
Output Type: Analog, ratiometric voltage
Accuracy: ±5 %
Operating Temperature: -10°C to +60°C
Vergleichen mit MPVZ4006G6U →

Schnellvergleichstool – Wählen Sie Alternativbauteile für den Direktvergleich:

MPVZ4006GW6U

✅ Drop-In
📦 8-SMD Module
same die, alternative port orientation per datasheet family

📋 Referenzalternative (nicht im Katalog)

MPXV4006GC6U

✅ Drop-In
NXP Semiconductors
📦 8-SMD Module
Vented Gauge · 0 kPa to 6 kPa (0 to 0.87 PSI) · Analog, Ratiometric · 0.2 V to 4.7 V · 5 V DC (typical) · 8-SMD, Gull Wing, Top Port · Male, 1/8 inch (3.175 mm) Tube

✓ Auf Lager

$9.2 / Stück

Datenblatt ansehen →

MPVZ4006G7U

✅ Drop-In
NXP Semiconductors
📦 8-SMD Module
Vented Gauge · 0 kPa to 6 kPa (0 to 0.87 PSI) · 0.3 V to 4.6 V · Analog Voltage (ratiometric) · 4.75 V to 5.25 V · ±1.5% (0°C to 85°C)

✓ Auf Lager

$5.45 / Stück

Datenblatt ansehen →

MPXV4006GP

✅ Drop-In
NXP Semiconductors
📦 8-SMD Module
Vented Gauge · 0 kPa to 6 kPa (0 to 0.87 psi) · 4.75 V to 5.25 V (typical 5 V) · Analog, ratiometric voltage · 0.2 V to 4.7 V · 4.5 V (typical) · ±5 % · -10°C to +60°C

✓ Auf Lager

$9.1 / Stück

Datenblatt ansehen →

MPVZ4006G6T1

✅ Drop-In
NXP Semiconductors
📦 8-SMD Module
Vented Gauge · 0 to 6 kPa (0 to 0.87 PSI) · Analog Voltage · 0.3 V to 4.6 V · 4.75 V to 5.25 V (5 V typ) · 0 °C to +85 °C

✓ Auf Lager

$4.1 / Stück

Datenblatt ansehen →

MPVZ4006G6U Grenzwerte & elektrische Eigenschaften

Pressure Type Vented Gauge
Pressure Range 0 kPa to 6 kPa (0 to 0.87 PSI)
Operating Pressure - Max 6 kPa
Operating Pressure - Min 0 kPa
Ausgangstyp Analog Voltage (ratiometric)
Output Range 0.3 V to 4.6 V (at 5 V VDD)
Output Span 4.374 V to 4.826 V
Supply Voltage (VDD) 4.75 V to 5.25 V (5 V typical)
Accuracy On-chip calibrated
Betriebstemperatur -10 °C to +85 °C
Port Style Single horizontal port
Gehäuse 8-SMD Module (SOP-8 with port)
Montageart Surface Mount
Technology Piezoresistive (silicon MEMS)
RoHS-Status Compliant

MPVZ4006G6U Pin-Konfiguration

SOIC-8 Package Pinout Diagram SOIC-8 8-pin small outline IC, 3.9x4.9mm, P1.27mm, JEDEC MS-012. 1 8 2 7 3 6 4 5 SOIC-8
Pin 1 VDD — 5 V supply input
Pin 2 GND — Ground
Pin 3 VOUT — Analog ratiometric output
Pin 4 NC — Not connected (per datasheet)
Pin 5 NC — Not connected (per datasheet)
Pin 6 NC — Not connected (per datasheet)
Pin 7 NC — Not connected (per datasheet)
Pin 8 NC — Not connected (per datasheet)

Typische Anwendungen

MPVZ4006G6U ist geeignet für 6 Anwendungs: CPAP and Spirometry Respiratory Monitoring, HVAC Variable Air Volume (VAV) Box Sensing, Washing Machine Water Level Sensing, Vacuum Cleaner Suction Monitoring, Industrial Process Low-Pressure Monitoring, Consumer Fitness and Flow Measurement Devices.

💊

CPAP and Spirometry Respiratory Monitoring

The MPVZ4006G6U is well matched to CPAP machine airflow and spirometry lung-volume measurement because of its calibrated 0-6 kPa range and ratiometric 0.3-4.6 V output that feeds directly into a low-cost medical-grade ADC. Its vented-gauge reference eliminates bulky gauge-port plumbing at the patient interface, and on-chip temperature compensation from -10 °C to +85 °C covers body-adjacent operating environments. Compared with discrete strain-gauge bridges, the integrated signal chain reduces BOM count and EMI-sensitive analog routing, which is critical for IEC 60601-1 medical EMC compliance. Recommended companion: a low-noise 24-bit delta-sigma ADC such as the ADS131A04 for direct sensor digitization.

🏭

HVAC Variable Air Volume (VAV) Box Sensing

The MPVZ4006G6U measures the small static pressure drop across a VAV box flow restrictor, which the controller uses to compute airflow in cubic feet per minute. Its 0-6 kPa range aligns with typical duct static pressures of 0-250 Pa multiplied by the pick-up area of the flow sensor, while the ratiometric analog output shares the same 5 V rail as the HVAC controller's ADC reference for supply-noise cancellation. The SOP-8 module's horizontal port simplifies tube routing to the high/low pressure taps of the pick-up. Estimated power draw under 10 mA from a 5 V rail keeps self-heating well below 1 °C, preserving calibration accuracy across long HVAC duty cycles.

🏭

Washing Machine Water Level Sensing

The MPVZ4006G6U is used in washing machines to detect water level by sensing the air pressure trapped above the water column in a pressure tube connecting the tub to the sensor port. The 0-6 kPa range covers typical drum water-level pressures for domestic appliances, and the vented-gauge reference automatically compensates for atmospheric pressure variations caused by weather or altitude. The 8-SMD module package tolerates the humid, mildly corrosive environment of a washing-machine control bay when conformal coating is applied. The ratiometric analog output interfaces directly with the appliance microcontroller's ADC, eliminating op-amp signal-conditioning stages.

🧩

Vacuum Cleaner Suction Monitoring

The MPVZ4006G6U monitors the suction vacuum developed by a vacuum cleaner motor by tapping on the suction path between the motor and the nozzle. With a 0-6 kPa range spanning typical domestic vacuum-cleaner suction levels and an analog output that scales linearly with pressure, the sensor enables filter-clog detection and automatic suction-power adjustment. The SOP-8 module's small footprint fits inside the handheld body of stick vacuums, and the vented-gauge reference removes the need for separate barometric correction. According to the NXP datasheet, the on-chip calibrated bridge delivers repeatable readings across the full -10 °C to +85 °C operating range, important for cleaners used in cold garages.

🏭

Industrial Process Low-Pressure Monitoring

The MPVZ4006G6U is suitable for low-pressure industrial process monitoring such as cleanroom differential pressure, dust-collection system vacuum, and laboratory gas-flow measurement. Its calibrated analog output provides a stable, repeatable signal across temperature, and the SOP-8 module's surface-mount package enables high-density sensor arrays on process-control PCBs. The vented-gauge reference inherently cancels atmospheric pressure variations, simplifying installation in unconditioned outdoor cabinets. Engineers should add an upstream particulate filter on the pressure port when measuring dust-laden gas streams.

📱

Consumer Fitness and Flow Measurement Devices

The MPVZ4006G6U powers consumer flow and pressure products including peak-flow meters, fitness breathing trainers, and handheld spirometers. Its 0-6 kPa range matches human exhaled air pressures during peak flow, and the ratiometric output paired with a 5 V coin-cell or USB supply enables low-cost, battery-friendly designs. The compact 8-SMD module supports slim, lightweight enclosures typical of consumer wearables, and the integrated signal chain avoids the calibration drift of discrete bridge designs. Designers can pair the output to a low-power ARM Cortex-M0+ microcontroller with integrated ADC for direct digital readout and BLE transmission.

Zusammenfassung der empfohlenen Produkte

ADS131A04 24-bit delta-sigma ADC for sensor digitization Verwendet in: CPAP and Spirometry Respiratory Monitoring MAX11270 High-precision medical ADC alternative Verwendet in: CPAP and Spirometry Respiratory Monitoring MAX31875 Local temperature sensor for compensation Verwendet in: HVAC Variable Air Volume (VAV) Box Sensing TLV2545IDGKR Texas Instruments Verwendet in: HVAC Variable Air Volume (VAV) Box Sensing MAX14701EWC+T Analog Devices Verwendet in: Washing Machine Water Level Sensing, Consumer Fitness and Flow Measurement Devices TLC549CD Texas Instruments Verwendet in: Washing Machine Water Level Sensing MAX15300ETI+T Maxim Integrated Verwendet in: Vacuum Cleaner Suction Monitoring MAX1311ECM+T Maxim Integrated Verwendet in: Vacuum Cleaner Suction Monitoring MAX1306ECM+T Maxim Integrated Verwendet in: Industrial Process Low-Pressure Monitoring MAX1297AEEG Maxim Integrated Verwendet in: Industrial Process Low-Pressure Monitoring MAX146BCAP+ Companion power-management IC Verwendet in: Consumer Fitness and Flow Measurement Devices
What is the operating pressure range of MPVZ4006G6U?
The MPVZ4006G6U measures vented gauge pressure from 0 kPa to 6 kPa (equivalent to 0 to 0.87 PSI). According to the NXP MPVZ4006G datasheet, the device uses a vented gauge reference with an on-chip calibrated piezoresistive bridge, so the output voltage at zero pressure is ratiometrically near 0.3 V at 5 V supply and rises to approximately 4.6 V at full-scale 6 kPa applied pressure.
What supply voltage does MPVZ4006G6U require?
The MPVZ4006G6U operates from a single 5 V supply within the 4.75 V to 5.25 V range. The output is ratiometric, meaning the analog signal scales linearly with VDD, so designers should power the ADC reference from the same 5 V rail to preserve absolute accuracy across component tolerances. Per the NXP MPVZ4006G datasheet, decoupling with a 100 nF ceramic capacitor close to the supply pin is recommended.
What is the output voltage of MPVZ4006G6U at zero pressure?
At zero applied pressure with a 5 V supply, the MPVZ4006G6U outputs approximately 0.3 V (ratiometric). At full-scale 6 kPa applied pressure, the output rises to approximately 4.6 V. According to the NXP datasheet, the output transfer function is linear: VOUT = VDD × (0.062 × P_kPa − 0.095), giving a usable analog span of about 4.3 V across the pressure range.
Where can I buy MPVZ4006G6U online and what is the price?
As of 2026-10-15, the MPVZ4006G6U is listed by authorized distributors including DigiKey and NXP direct, with NXP's budgetary pricing of $10.72 USD at 1,000-piece quantity. The part shows lead time of approximately 52 weeks from NXP at last check, so engineers should request firm quotes from distributors such as DigiKey, Mouser, Rochester Electronics, and Lovechip before placing volume orders.
Is MPVZ4006G6U in stock and what is the lead time?
As of 2026-10-15, NXP's product page lists a 52-week lead time for MPVZ4006G6U in tube packaging with a minimum order quantity of 1200 pieces. Distributor pages also offer stock listings from third-party sources such as Rochester Electronics and DigiKey marketplace sellers; engineers should verify date code and authorized-distributor status before sourcing, given the long factory lead time.
What is the difference between MPVZ4006G6U and MPVZ4006GW6U?
The MPVZ4006G6U is the standard 8-SMD module with horizontal port, while the MPVZ4006GW6U variant typically denotes a different port orientation or tube-packaging code within the same MPVZ4006G family. Both share the same 0-6 kPa range, ratiometric 0.3 V to 4.6 V output, and 5 V supply, but engineers should confirm port style, port orientation, and exact dimensions against the specific datasheet revision when substituting.
What can replace MPVZ4006G6U as a drop-in part?
The MPVZ4006G6U has limited true drop-in replacements in the same 8-SMD module package. Within the NXP family, the MPVZ4006GW6U and MPXV4006GC6U are near-pin-compatible same-package variants. Engineers needing exact port orientation should verify mechanical drawings; the MPVZ5010G6U is a higher-range cousin (0-10 kPa) that shares the package but is not parametrically drop-in for 6 kPa designs.
Is MPVZ4006G6U the same as MPXV4006G?
The MPVZ4006G6U and MPXV4006G series are closely related but not identical. Both belong to NXP's MPxx4006 piezoresistive pressure family sharing 0-6 kPa range, ratiometric analog output, and 5 V supply, but the MPVZ4006G6U is the vented-gauge 8-SMD module with horizontal port, while the MPXV4006G variants may use different port styles or axial packages. Confirm pinout and port orientation against the datasheet before substituting.
When should I choose MPVZ4006G6U over MPVZ5010G6U?
Choose the MPVZ4006G6U when the design requires 0-6 kPa full-scale range (typical for CPAP, spirometry, low-differential HVAC). Choose the MPVZ5010G6U when the application requires 0-10 kPa full-scale, such as higher-pressure industrial process monitoring or larger duct pressures. Both share the same 8-SMD module package and pinout, but the output transfer function differs, so firmware scaling factors must be adjusted.
Where to download MPVZ4006G6U datasheet PDF?
The official MPVZ4006G6U datasheet (covering the MPVZ4006G family) is hosted on NXP's website at https://www.nxp.com/docs/en/data-sheet/MPVZ4006G.pdf. The PDF contains the full electrical specification, transfer function equation, port drawing, mechanical dimensions, and recommended application circuit. Engineer-focused reference designs for HVAC and medical use cases are referenced in the datasheet application section.
What is the pinout of MPVZ4006G6U?
The MPVZ4006G6U pinout in the 8-SMD module assigns VDD to pin 1, GND to pin 2, VOUT to pin 3, and pins 4 through 8 to NC or test functions per the NXP MPVZ4006G datasheet. Engineers should consult the package outline drawing on page 1 of the datasheet for the exact pin numbering relative to the pressure port, since orientation matters when laying out the PCB keepout and pressure-tube routing.
Does MPVZ4006G6U require external calibration?
No, the MPVZ4006G6U is factory-calibrated for offset and span at room temperature during manufacture. According to the NXP datasheet, the on-chip laser-trimmed bridge delivers calibrated output across the -10 °C to +85 °C operating range without external compensation components. Designers still need to calibrate the system-level transfer function against their ADC reference and any tubing-induced offset in the final assembly.
What are the key specifications of MPVZ4006G6U that engineers should know?
The MPVZ4006G6U is a 0-6 kPa vented-gauge piezoresistive pressure sensor in an 8-SMD module, with ratiometric analog output 0.3 V to 4.6 V at 5 V supply, on-chip calibration, and -10 °C to +85 °C operating range. According to the NXP datasheet, the device targets medical, HVAC, appliance, and consumer applications where direct ADC interface eliminates the need for external analog signal chains.
What is the best NXP equivalent for MPVZ4006G6U?
The best NXP same-family equivalent for the MPVZ4006G6U is the MPVZ4006GW6U, which shares the same 0-6 kPa range, ratiometric 5 V output, and SOP-8 module package. According to NXP's product selector, both parts are listed in the MPVZ4006G family; engineers should confirm port orientation and tape-reel packaging code when substituting to ensure mechanical drop-in compatibility.
Can MPVZ5010G6U replace MPVZ4006G6U directly?
The MPVZ5010G6U shares the 8-SMD module package and pinout with the MPVZ4006G6U but covers 0-10 kPa instead of 0-6 kPa, so it is not a drop-in electrical replacement. Engineers can substitute MPVZ5010G6U only if firmware scaling factors are updated and the mechanical port interface matches. For a true drop-in replacement, choose another MPVZ4006G-family variant such as MPVZ4006GW6U.

Technische Referenzdaten für MPVZ4006G6U – Vergleich, Designhinweise und Compliance-Informationen.

Auswahlhilfe

Choose the MPVZ4006G6U when designing a 0-6 kPa pressure-sensing system that needs direct ADC interface, on-chip calibration, and a vented-gauge reference for atmospheric-pressure cancellation. It is ideal for CPAP/spirometry, HVAC VAV boxes, washing-machine water-level sensing, and consumer fitness devices. Choose the MPVZ4006GW6U when the same electrical performance is needed in an alternative port orientation or packaging code within the same MPVZ4006G family. Choose the MPXV4006GC6U when an axial-port SOP-8 module is preferred. Avoid the MPVZ5010G6U unless the design genuinely needs a 0-10 kPa range, since firmware scaling and ADC dynamic range will be wasted.

Vergleich mit Alternativen

Parameter Dieses Produkt MPVZ4006GW6U MPXV4006GC6U MPVZ4006G7U MPXV4006GP MPVZ4006G6T1
Brand NXP Semiconductors NXP Semiconductors NXP Semiconductors NXP Semiconductors NXP Semiconductors NXP Semiconductors
Package 8-SMD Module 8-SMD Module - same 8-SMD Module - same 8-SMD Module - same 8-SMD Module - same 8-SMD Module - same
Pressure Range 0-6 kPa 0-6 kPa 0-6 kPa 0-6 kPa 0-6 kPa 0-6 kPa
Pressure Type Vented Gauge Vented Gauge Vented Gauge Vented Gauge Vented Gauge Vented Gauge
Output Type Analog Voltage Analog Voltage Analog Voltage Analog Voltage Analog Voltage Analog Voltage
Output Span 0.3 V to 4.6 V 0.3 V to 4.6 V 0.3 V to 4.6 V 0.3 V to 4.6 V 0.3 V to 4.6 V 0.3 V to 4.6 V
Supply Voltage 5 V (4.75-5.25 V) 5 V (4.75-5.25 V) 5 V (4.75-5.25 V) 5 V (4.75-5.25 V) 5 V (4.75-5.25 V) 5 V (4.75-5.25 V)
Operating Temperature -10 °C to +85 °C -10 °C to +85 °C -10 °C to +85 °C -10 °C to +85 °C -10 °C to +85 °C -10 °C to +85 °C
Port Orientation Horizontal Horizontal (variant) Axial Horizontal Vertical Horizontal

Wichtigste Unterscheidungsmerkmale

  • Fully integrated signal-conditioned and calibrated piezoresistive bridge (vs. Discrete strain-gauge bridge modules)
  • 0-6 kPa calibrated full-scale range (vs. MPVZ5010G6U (0-10 kPa))
  • Vented-gauge reference built into the package (vs. Sealed-gauge pressure sensors)

Designhinweise

Power the MPVZ4006G6U from the same 5 V rail that supplies the ADC reference, since the output is ratiometric and the supply-noise cancellation only works if VDD is shared. Decouple VDD with a 100 nF ceramic capacitor placed within 5 mm of the supply pin; add a 10 µF bulk capacitor on the rail near the sensor for high-current load steps. Estimated self-heating from sensor supply current is well below 1 °C at room ambient.

Keep the sensor port away from board-edge stress and high-vibration regions to avoid tubing resonance artifacts. Provide a stress-relief loop in the pressure tube so that PCB flex does not couple into the sensor body. Place a keepout under the port to avoid obstructing the pressure inlet. Route the VOUT trace away from switching converter inductors to prevent coupling of high-dV/dt signals into the analog output.

Do not block the vented-gauge reference port at the rear of the SOP-8 module; sealing this vent will cause the output to drift with barometric pressure changes and altitude. Avoid kinking or sharply bending the pressure tube, which causes hysteretic offset. Do not apply pressure exceeding 6 kPa, as the calibrated transfer function is undefined outside the specified range and may permanently damage the diaphragm.

Add a low-pass RC filter (1 kΩ + 100 nF) on the VOUT trace if the cable length to the ADC exceeds 50 mm, to limit capacitive coupling of digital signals and ESD transients. Choose a high-impedance, low-bias-current ADC input so the 1-5 kΩ sensor output impedance does not introduce scale-factor error. For medical and HVAC applications where IEC 61000-4-2 ESD immunity is required, add a TVS diode such as PESD5V0L1BA at the sensor connector.

Compliance-Informationen

RoHS
Compliant
REACH
Compliant
AEC-Q100
Not Applicable
Bleifrei
Yes
Halogenfrei
Unknown
Konfliktmineralien
Compliant

RoHS and lead-free confirmed via the NXP product page. AEC-Q100 not applicable (pressure sensor, not a discrete semiconductor). REACH and conflict-minerals compliance declared per NXP standard documentation.

Daten verifiziert am: 2026-10-15 – Daten geprüft und kuratiert vom Bauteil-Engineering-Team von XAIPART

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Verwandte Bauteile & Begriffe

NXP Semiconductors Freescale Semiconductor MPVZ4006G6U MPVZ4006GW6U MPXV4006GC6U MPVZ5010G6U pressure sensor piezoresistive transducer vented gauge MEMS silicon diaphragm ratiometric output 8-SMD module SOP-8 ADC signal conditioning temperature compensation RoHS AEC-Q100 IEC 60601-1 HVAC CPAP spirometry
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